Tag search on ‘lithography’
Equipment Name | Description & Use | Department | Contact |
---|---|---|---|
E-beam lithography ad-on to the FESEM | Uses the electron beam of the scanning electron microscope to creates patterns down to sub-10 nm onto substrates coated with an electron beam sensitive resist. | Biological Sciences | oskalli@memphis.edu |
Mask Aligner | Photolithography | Physics and Materials Science | gustav.borstad@memphis.edu |
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