E-beam lithography ad-on to the FESEM
Equipment Information
Instrument Name
E-beam lithography ad-on to the FESEM
Make
Nabity
Model
NPGS
Count
1
Description of Use and Application
Uses the electron beam of the scanning electron microscope to creates patterns down to sub-10 nm onto substrates coated with an electron beam sensitive resist.
Collaboration Plans and Interdisciplinary Engagement for Equipment
Part of shared research facility
UofM Inventory Number
12914700
Weblink
Requirements
Usage Requirements
Contact IMC staff https://www.memphis.edu/imc/contact/in-depth or sign up on line for frequent users
Health and Safety Training Requirements
Training required
Materials
Samples on SEM stubs.
Shareable
Rates
Internal Hourly Rate ($USD)
40.00
External Non-Profit Hourly Rate ($USD)
0.00
External For-Profit Hourly Rate ($USD)
85.00
Service Rate ($USD)
Additional Fee/Rate Description
Location
Campus
Main Campus
Building
Life Sciences Building
Room
109
Contact Information
Department
Biological Sciences
Chair Name
Omar Skalli
Center
Integrated Microscopy Center
Contact Name
Omar Skalli
Contact Phone Number
(901) 494-7342
Contact E-Mail
Department Weblink
General Asset Information
Responsible Group
Research Equipment Asset Managers
Asset ID
RE-000020
Status
OPERATIONAL
Linked Persons
Omar Skalli
Searchable Keywords
microscopy, electron microscopy, elcton beam patterning
Searchable Tags
lithography, microscopy, device