Atomic Layer Deposition system

Equipment Information

Instrument Name
Atomic Layer Deposition system
Make
ALD-AZO
Model
Ensure Labnano 9000
Count
1
Description of Use and Application
Atomic layer deposition system for thin film AZO fabrication
Collaboration Plans and Interdisciplinary Engagement for Equipment
UofM Inventory Number
Weblink

Requirements

Usage Requirements
Health and Safety Training Requirements
Materials
Shareable

Rates

Internal Hourly Rate ($USD)
0.00
External Non-Profit Hourly Rate ($USD)
0.00
External For-Profit Hourly Rate ($USD)
0.00
Service Rate ($USD)
Additional Fee/Rate Description

Location

Campus
Main Campus
Building
Manning Hall
Room
420

Contact Information

Department
Physics and Materials Science
Chair Name
Firouzeh Sabri
Center
Nanophotonics Lab
Contact Name
Thang Hoang
Contact Phone Number
(901) 678-3122
Contact E-Mail

General Asset Information

Responsible Group
Research Equipment Asset Managers
Asset ID
RE-000477
Status
OPERATIONAL
Linked Persons
Firouzeh Sabri
Searchable Keywords
material deposition, thin film deposition
Searchable Tags
physics, materials, deposition