Atomic Layer Deposition system
Equipment Information
Instrument Name
Atomic Layer Deposition system
Make
ALD-AZO
Model
Ensure Labnano 9000
Count
1
Description of Use and Application
Atomic layer deposition system for thin film AZO fabrication
Collaboration Plans and Interdisciplinary Engagement for Equipment
UofM Inventory Number
Requirements
Usage Requirements
Health and Safety Training Requirements
Materials
Shareable
Rates
Internal Hourly Rate ($USD)
0.00
External Non-Profit Hourly Rate ($USD)
0.00
External For-Profit Hourly Rate ($USD)
0.00
Service Rate ($USD)
Additional Fee/Rate Description
Location
Campus
Main Campus
Building
Manning Hall
Room
420
Contact Information
Department
Physics and Materials Science
Chair Name
Firouzeh Sabri
Center
Nanophotonics Lab
Contact Name
Thang Hoang
Contact Phone Number
(901) 678-3122
Contact E-Mail
Department Weblink
General Asset Information
Responsible Group
Research Equipment Asset Managers
Asset ID
RE-000477
Status
OPERATIONAL
Linked Persons
Firouzeh Sabri
Searchable Keywords
material deposition, thin film deposition
Searchable Tags
physics, materials, deposition